Applied Computational Mathematics Division


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Intrinsic Birefringence in Cubic Crystalline Optical Materials

Eric Shirley
Physics Laboratory, Optical Technology Division

Thursday, June 10, 2004 14:00-15:00,
NIST North (820), Room 145
Gaithersburg
Thursday, June 10, 2004 12:00-13:00,
Room 4511
Boulder

Abstract: In this talk, we will review the status of intrinsic birefringence in calcium, barium, strontium, and lithium fluorides that are of interest to deep ultraviolet (DUV) photolithography. This birefringence is a weak effect arising from the finite wave vector of light, which is the only symmetry-breaking factor in the optical properties of cubic materials. This birefringence has been characterized experimentally and theoretically with first-principles calculations of optical properties developed in part at NIST. We will discuss the symmetry properties of the birefringence and ways to work around it, including revised optical layouts of lithographic systems and using different combinations of materials.

Speaker Bio: Eric Shirley received his PhD in Physics in 1991 from the University of Illinois at Urbana-Champaign. As a Hertz Fellow at Urbana-Champaign, he studied electron correlation effects in atoms, molecules, and solids. From 1991-1993, Eric was a Miller Fellow at the University of California-Berkeley and from 1993-1994 he held a postdoctoral position at Lawrence Livermore National Laboratory. Eric joined the NIST Physics Laboratory in 1994, where his research interests include computation of optical properties of materials throughout most of the electromagnetic spectrum (far infrared to hard x-ray) as well as mathematical physics, especially in relation to diffraction effects in radiometry.

Presentation Slides: PDF

Contact: P. M. Ketcham

Note: Visitors from outside NIST must contact Robin Bickel; (301) 975-3668; at least 24 hours in advance.